1200°c Pe/cvd furnace for high-temperature material synthesis
Enhance your material processing capabilities with precise temperature control and versatile deposition, enabling advanced material solutions such as thermal coatings and thin-film innovations.
Executes Deposition, Heating, and Vacuum Sealing Processes
The STF1200 series from Across International is a specialized PE/CVD Furnace, featuring Kanthal A1 heating elements within Mitsubishi alumina fiber insulation. This system is pivotal for precision film deposition and heat treatments across industries such as semiconductors and aerospace. Capable of temperatures up to 1200°C, it offers single or multi-zone operation facilitated by a Eurotherm digital controller, supporting both remote monitoring and data export. Ideal for producing silicon wafer coatings, ceramic matrix composites, and catalytic components, it integrates seamlessly with existing production lines through its advanced vacuum sealing, gas mixing capabilities, and RF generator for plasma-enhanced processes. The furnace’s compact design and durable dual-layer steel housing ensure minimal heat loss and long operational life. Compliance with UL/CSA standards is available, guaranteeing safety and reliability in diverse operational environments. For ease of maintenance, the furnace includes self-tuning PID control and automatic rebounding post-power failures, while customization options like the pre-heater and controller configurations enhance process flexibility.
Benefits
- Achieves consistent, high-quality film deposition, crucial for advanced material applications.
- Streamlines multi-atmosphere processes, reducing operational complexity and time.
- Enhances energy efficiency with optimized heating elements, lowering operational costs.
- Facilitates seamless integration with production lines through advanced control systems.
- Minimizes maintenance with robust design and remote monitoring capabilities.
- Applications
- Chemistry,Automotive and aerospace,Metallurgy,Material science,Industrial process,Battery and fuel cell,Semiconductors,Food and beverage,Life science,Pharmaceuticals
- End products
- Fuel cell membranes,Nanostructured materials,Active pharmaceutical ingredients,Silicon wafer coatings,Food packaging materials,Thin-film batteries,Aerospace ceramic matrix composites,Catalytic converter components,Ceramic thermal barrier coatings,Metal alloy heat treatments
- Steps before
- Purification,Drying,Gas Mixing,Substrate Preparation
- Steps after
- Cooling,Vacuum Pumping,Film Analysis,System Cleaning
- Input ingredients
- Quartz tube,Gas mixture,Electricity
- Output ingredients
- CVD coatings,PECVD coatings,Sintered parts
- Market info
- Across International is known for manufacturing high-quality thermal management equipment, such as vacuum ovens, furnaces, and laboratory equipment, with a strong reputation for reliability and innovation in industries like materials research, cannabis processing, and laboratory testing.
- Maximum Temperature
- 1200°C
- Constant Working Temperature
- 1100°C
- Heating Rate
- < 30°C / min
- Temperature Controller Precision
- +/- 1°C
- RF Output Power
- 5 to 500 watts
- RF Frequency
- 13 MHz
- Electrical Requirements (Furnace)
- 208-240VAC,50/60 Hz,single phase
- Thermocouple Type
- K
- Vacuum Sealing Flange Kit
- Stainless steel with pressure meter
- Tube Material
- Quartz
- Heating Element
- Kanthal® A1 resistance coil wire
- Refractory Lining
- Mitsubishi® 1500 Grade Fiber Alumina
- Automation level
- Eurotherm controller
- Batch vs. continuous operation
- Batch / Inline Continuous
- Changeover time
- Quick access with top-open chamber
- Cleaning method
- Manual
- Density/particle size
- 0.5–2.5 g/cm³ / 50–1000 µm
- UL/CSA certification
- Yes
- ETL tested
- UL/CSA standards
- Machine footprint
- Compact and portable design
- Furnace type
- Single or multi-zone split tube
- Heating element
- Kanthal (Sweden) wire heating elements
- Chamber access
- Top-open furnace chamber
- Insulation
- Mitsubishi (Japan) alumina fiber
- Housing
- Dual-layer steel housing
- Tube furnace
- 1-zone 60mm OD stationary,1-zone 100mm OD stationary,1-zone 150mm OD stationary,1-zone 60mm OD slidable,1-zone 100mm OD slidable,1-zone 150mm OD slidable,2-zone 60mm OD stationary,2-zone 100mm OD stationary,2-zone 150mm OD stationary,2-zone 60mm OD slidable,2-zone 100mm OD slidable,2-zone 150mm OD slidable,3-zone 60mm OD stationary,3-zone 100mm OD stationary,3-zone 150mm OD stationary
- Pre-heater option
- Pre-heater for 60mm 1200°C PE/CVD system,Pre-heater for 100mm and 150mm tubes 1200°C PE/CVD system
- RF generator
- 500 watts 13MHz RF generator
- Controller option
- Standard Eurotherm 3204 8-Segment Controller,Optional Eurotherm 3504 50-Segment Controller x 1,Optional Eurotherm 3504 50-Segment Controller x 2,Optional Eurotherm 3504 50-Segment Controller x 3
- Vacuum setup
- 3/8" hose barb with no pump,KF25 flange port with no pump,Ai 110v SuperVac 11 cfm 0.3 micron oil pump UL/CSA/CE certified,Edwards 110/220v 6.9 cfm RV8 oil pump UL/CSA/CE certified,Edwards 110/220v 21 cfm E2M28 oil pump UL/CSA/CE certified,Edwards 110/220v 7.5 cfm nXDS10iC dry scroll pump UL/CSA/CE certified
- Gas mixing system
- 2-channel with digital flow meters,3-channel with digital flow meters,4-channel with digital flow meters,5-channel with digital flow meters,6-channel with digital flow meters
- Accessory
- 2 quarts (1.9 L) of ultra grade 19 pump oil,EZ-Swap vacuum pump exhaust filter w/ fittings,Supporting Mobile Cart
- Digital vacuum gauge
- Inficon PCG55x diaphragm gauge,Zhenghua ZDF-III,Zhenghua ZDF-V
- Channel flow rate
- 5 mL to 10 L per minute (SCCM/SLM)
- Delivery liftgate service
- Liftgate service available