Cleanroom condensation particle counter for nanoparticle detection
In semiconductor manufacturing, maintaining ultra-clean environments is crucial. Tracking down nano-scale particle contamination can prevent defects and improve yield. Low particle concentrations in these settings require precise and reliable monitoring tools.
Accurately monitor nano-scale particle contamination
The AeroTrak™ Cleanroom Condensation Particle Counter Model 9001 from TSI Systems is a high flow rate instrument uniquely suited for low particle concentration environments like ISO Class 1 and 2 cleanrooms. This water-based, laminar flow counter provides 10 nm sensitivity at a flow rate of 0.1 CFM (2.83 L/min) and features a very low false-count rate of less than 0.07 count/ft3. This ensures accurate measurements even in ultra-clean environments. It utilizes ultra-pure or deionized water, avoiding contamination from alcohol or other chemicals. It offers a fast response time, data storage for 250 zones, 999 locations, and 10,000 samples. The stainless steel enclosure ensures durability, and it’s compatible with the AeroTrak High Pressure Diffuser Model 7950 for high pressure gas measurements.
Benefits
- 10 nm sensitivity for detecting the smallest particles
- Minimal false counts for reliable data
- Fast response times enhance monitoring efficiency
- Uses ultra-pure or DI water to avoid contamination
- Extensive data storage and recall capabilities