1400°c Cvd tube furnace for advanced material processing

Boost your R&D with a high-temperature 1400°C CVD tube furnace designed for precise deposition and sintering, enhancing material properties for advanced applications like semiconductor substrates and aerospace coatings.

Deposits and Processes High-Temperature Coatings and Ceramics

The TF1400 series Chemical Vapor Deposition (CVD) Tube Furnace from Across International offers a robust solution for high-temperature deposition and materials processing. Featuring a Mitsubishi high-quality alumina fiber insulation and SiC heating elements, this furnace minimizes heat loss and ensures reliable temperature control up to 1400°C. Integrated with an advanced Eurotherm digital controller, it allows precise multi-segment programming and remote operation capabilities. Ideal for generating silicon wafers, zirconia ceramics, and thermal barrier coatings, the furnace accommodates continuous deposition and sintering processes in the semiconductor and advanced materials sectors.

Equipped with a customizable gas mixing system and optional vacuum pump configurations, it is suitable for diverse applications including oxidation and nitridation within the fields of materials science and aerospace. The sturdy alumina tube construction offers high purity and corrosion resistance, making it apt for various gaseous environments. Ensuring user safety, it incorporates overheat protection and power failure recovery, meeting stringent industrial standards. Additionally, optional customization features and engineering support provide adaptability to specific process requirements.

Benefits

  • Enhances process efficiency with precise temperature and gas control, minimizing material waste.
  • Supports diverse material applications, from semiconductors to advanced ceramics, increasing production versatility.
  • Minimizes energy consumption through optimized heating element design, reducing operational costs.
  • Provides high purity processing capability, ensuring quality and consistency in end-products.
  • Ensures reliable operation with integrated safety features and power failure recovery, minimizing equipment downtime.

General


Applications
Chemicals,Advanced ceramics,Research and development,Materials science,Aerospace materials,High-temperature research materials,Semiconductor materials,Thermal barrier coatings,Composite materials,Functional coatings,Industrial coatings,Metal oxides
End products
Silicon wafers,Oxide dispersion strengthened materials,Titanium dioxide coatings,Fiber-reinforced composites,Dielectric barrier layers,Thermal protection systems,Thermal insulation panels,Gallium nitride substrates,Superalloy components,Zirconia ceramics,Piezoelectric devices,Nanocomposite thin films
Steps before
Preheating,Material Loading,Gas Supply Configuration
Steps after
Cooling,Vacuum Sealing,Inspection,Packaging
Input ingredients
gas mixture,inert gas,vacuum environment,ambient air,chemical vapors
Output ingredients
processed materials,sintered parts,binder-free products
Market info
Across International is known for manufacturing high-quality thermal management equipment, such as vacuum ovens, furnaces, and laboratory equipment, with a strong reputation for reliability and innovation in industries like materials research, cannabis processing, and laboratory testing.

Technical Specifications


Max Temperature
1400°C
Constant Working Temperature
1300°C
Temperature Precision
±1°C
Max Heating Rate above 1200°C
5°C/min
Max Heating Rate below 1200°C
10°C/min
Tube Material
High purity (99%) Al2O3 alumina
Thermocouple Type
Type S
Refractory Lining
1600 grade fiber alumina
Heating Element
Silicon carbide (SiC)
Electrical Requirements
208-240VAC,50/60 Hz,single phase
Controller Type
Eurotherm 3204 or 3504
Segments Programmer
3204
Vacuum Sealing Flange Kit
Stainless steel with pressure meter and valves

Operating Characteristics


Temperature Range
Ambient / 1400°C
Temperature Control
±1°C
Heating Rate
5°C/min above 1200°C,10°C/min below 1200°C
Automation level
Microprocessor-based PID control
Batch vs. Continuous Operation
Batch
Overheat Protection
Yes
Power Failure Protection
Yes
Atmosphere Processes
Multiple,including inert gas environment
Sealing Flange
Stainless steel with pressure meter
Controller Connectivity
PC Interface for remote control

Material Compatibility


High temperature resistance
Up to 1400°C
Thermal stability
Stable at high temperatures
Insulating properties
Mitsubishi high quality alumina fiber
Material purity
99% Al2O3 alumina

Product type Characteristics


Gas Mixing System
2-6 channel with digital flow meters

Physical Characteristics


Machine footprint
Customizable based on configuration
Tube diameter
60mm or 100mm OD
Zone options
1,2,or 3-zone
Chamber material
High purity alumina (99% Al2O3)
Furnace construction
Dual-wall steel
Heating element material
Silicon carbide (SiC)
Refractory lining
1600 grade fiber alumina