1400°c Cvd tube furnace for advanced material processing
Boost your R&D with a high-temperature 1400°C CVD tube furnace designed for precise deposition and sintering, enhancing material properties for advanced applications like semiconductor substrates and aerospace coatings.

Deposits and Processes High-Temperature Coatings and Ceramics
The TF1400 series Chemical Vapor Deposition (CVD) Tube Furnace from Across International offers a robust solution for high-temperature deposition and materials processing. Featuring a Mitsubishi high-quality alumina fiber insulation and SiC heating elements, this furnace minimizes heat loss and ensures reliable temperature control up to 1400°C. Integrated with an advanced Eurotherm digital controller, it allows precise multi-segment programming and remote operation capabilities. Ideal for generating silicon wafers, zirconia ceramics, and thermal barrier coatings, the furnace accommodates continuous deposition and sintering processes in the semiconductor and advanced materials sectors.
Equipped with a customizable gas mixing system and optional vacuum pump configurations, it is suitable for diverse applications including oxidation and nitridation within the fields of materials science and aerospace. The sturdy alumina tube construction offers high purity and corrosion resistance, making it apt for various gaseous environments. Ensuring user safety, it incorporates overheat protection and power failure recovery, meeting stringent industrial standards. Additionally, optional customization features and engineering support provide adaptability to specific process requirements.
Benefits
- Enhances process efficiency with precise temperature and gas control, minimizing material waste.
- Supports diverse material applications, from semiconductors to advanced ceramics, increasing production versatility.
- Minimizes energy consumption through optimized heating element design, reducing operational costs.
- Provides high purity processing capability, ensuring quality and consistency in end-products.
- Ensures reliable operation with integrated safety features and power failure recovery, minimizing equipment downtime.
- Applications
- Chemicals,Advanced ceramics,Research and development,Materials science,Aerospace materials,High-temperature research materials,Semiconductor materials,Thermal barrier coatings,Composite materials,Functional coatings,Industrial coatings,Metal oxides
- End products
- Silicon wafers,Oxide dispersion strengthened materials,Titanium dioxide coatings,Fiber-reinforced composites,Dielectric barrier layers,Thermal protection systems,Thermal insulation panels,Gallium nitride substrates,Superalloy components,Zirconia ceramics,Piezoelectric devices,Nanocomposite thin films
- Steps before
- Preheating,Material Loading,Gas Supply Configuration
- Steps after
- Cooling,Vacuum Sealing,Inspection,Packaging
- Input ingredients
- gas mixture,inert gas,vacuum environment,ambient air,chemical vapors
- Output ingredients
- processed materials,sintered parts,binder-free products
- Market info
- Across International is known for manufacturing high-quality thermal management equipment, such as vacuum ovens, furnaces, and laboratory equipment, with a strong reputation for reliability and innovation in industries like materials research, cannabis processing, and laboratory testing.
- Max Temperature
- 1400°C
- Constant Working Temperature
- 1300°C
- Temperature Precision
- ±1°C
- Max Heating Rate above 1200°C
- 5°C/min
- Max Heating Rate below 1200°C
- 10°C/min
- Tube Material
- High purity (99%) Al2O3 alumina
- Thermocouple Type
- Type S
- Refractory Lining
- 1600 grade fiber alumina
- Heating Element
- Silicon carbide (SiC)
- Electrical Requirements
- 208-240VAC,50/60 Hz,single phase
- Controller Type
- Eurotherm 3204 or 3504
- Segments Programmer
- 3204
- Vacuum Sealing Flange Kit
- Stainless steel with pressure meter and valves
- Temperature Range
- Ambient / 1400°C
- Temperature Control
- ±1°C
- Heating Rate
- 5°C/min above 1200°C,10°C/min below 1200°C
- Automation level
- Microprocessor-based PID control
- Batch vs. Continuous Operation
- Batch
- Overheat Protection
- Yes
- Power Failure Protection
- Yes
- Atmosphere Processes
- Multiple,including inert gas environment
- Sealing Flange
- Stainless steel with pressure meter
- Controller Connectivity
- PC Interface for remote control
- High temperature resistance
- Up to 1400°C
- Thermal stability
- Stable at high temperatures
- Insulating properties
- Mitsubishi high quality alumina fiber
- Material purity
- 99% Al2O3 alumina
- Gas Mixing System
- 2-6 channel with digital flow meters
- Machine footprint
- Customizable based on configuration
- Tube diameter
- 60mm or 100mm OD
- Zone options
- 1,2,or 3-zone
- Chamber material
- High purity alumina (99% Al2O3)
- Furnace construction
- Dual-wall steel
- Heating element material
- Silicon carbide (SiC)
- Refractory lining
- 1600 grade fiber alumina